Intercomparison of scanning probe microscopes
- 1 July 2002
- journal article
- Published by Elsevier in Precision Engineering
- Vol. 26 (3) , 296-305
- https://doi.org/10.1016/s0141-6359(02)00114-9
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
- A sample scanning system with nanometric accuracy for quantitative SPM measurementsPublished by Elsevier ,2001
- Real-time, interferometrically measuring atomic force microscope for direct calibration of standardsReview of Scientific Instruments, 1999
- Lateral metrology using scanning probe microscopes, 2D pitch standards and image processingApplied Physics A, 1998
- A metrological scanning force microscope used for coating thickness and other topographical measurementsApplied Physics A, 1998
- Industrial Uses of STM and AFMCIRP Annals, 1997
- Capabilities and limitations of interference microscopy for two- and three-dimensional surface-measuring technologyMeasurement, 1996
- Calibration of step height standards for nanometrology using interference microscopy and stylus profilometryPrecision Engineering, 1995
- Dimensional metrology with scanning probe microscopesJournal of Applied Physics, 1993