The piezoelectric effect of GaAs used for resonators and resonant sensors
- 1 March 1994
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 4 (1) , 28-34
- https://doi.org/10.1088/0960-1317/4/1/004
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Gallium arsenide as a mechanical materialJournal of Micromechanics and Microengineering, 1994
- Flexural vibrations in piezoelectric semi-insulating GaAsSensors and Actuators A: Physical, 1993
- Piezoelectric properties of GaAs for application in stress transducersJournal of Applied Physics, 1991
- A phenomenological method of predicting the performance of piezoelectric beamsJournal of Micromechanics and Microengineering, 1991
- Pressure measurement by GaAs piezoelectric sensorsElectronics Letters, 1990
- Temperature sensors: New technologies on their way to industrial applicationSensors and Actuators, 1989
- An approximate expression for the motional capacitance of a lateral field resonatorIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1988
- GaAs, AlAs, and AlxGa1−xAs: Material parameters for use in research and device applicationsJournal of Applied Physics, 1985
- Fiber-optic systems for temperature and vibration measurements in industrial applicationsOptics and Lasers in Engineering, 1984
- High−frequency vibrations of crystal plates under initial stressesThe Journal of the Acoustical Society of America, 1975