A real-time electron beam testing system (IC testing application)
- 1 March 1989
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 22 (3) , 138-143
- https://doi.org/10.1088/0022-3735/22/3/001
Abstract
A real-time electron beam testing system is described which consists of a scanning electron microscope, a very fast secondary electron detection system and a digitising oscilloscope. The system enables one to measure the signal with logic swings between 0.4-4 V and repetition rates of from 100 Hz to 100 MHz with a high time resolution of 10 ns: a signal with a very low duty factor of 10-6 is measurable.Keywords
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