Rare earth overlayers on silicon
- 6 February 1995
- journal article
- Published by IOP Publishing in Journal of Physics: Condensed Matter
- Vol. 7 (6) , 991-1022
- https://doi.org/10.1088/0953-8984/7/6/006
Abstract
The physiochemical properties of thin layers of rare earth metals and rare earth silicides on Si substrate surfaces are reviewed. The topics discussed include the formation of reactive interfaces at room temperature, the evolution of ordered surface structures at elevated temperature and the oxidation of rare earth interfaces and silicides. Special emphasis is placed on the discussion of the geometrical and electronic structure of ordered overlayer phases.Keywords
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