Analysis and design considerations of three-dimensional vector accelerometer using SOI structure for wide temperature range
- 1 July 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 55 (2-3) , 91-97
- https://doi.org/10.1016/s0924-4247(97)80062-3
Abstract
No abstract availableKeywords
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- A novel silicon accelerometer with a surrounding mass structureSensors and Actuators A: Physical, 1990