Direct Observation of the Segregated Microstructures within Co-Cr Film Grains
- 1 February 1989
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 28 (2A) , L248
- https://doi.org/10.1143/jjap.28.l248
Abstract
The existence of a segregated microstructure within sputtered 4.1 µm-thick Co-22 at%Cr film grains is proved directly by high-spatial-resolution X-ray microanalysis. The results indicate the existence of grains comprising a Cr-rich core surrounded by a Co-rich ring, and an indication of Cr-enriched grain boundaries. This microstructure coincides well with the latent microstructure revealed by selective wet-etching with dilute aqua regia.Keywords
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