Plasma-Sheath Boundary in Plasmas Containing Thermal and Beam Electrons
- 1 June 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (6R) , 3578-3585
- https://doi.org/10.1143/jjap.33.3578
Abstract
The behaviour of the plasma-sheath boundary in the presence of beam electrons with finite temperature is modelled assuming a criterion for sheath formation. Solutions for the sheath edge potential are found from two separate treatments; a charge balance model and a dispersion relation description of the plasma. Ion saturation currents and floating potentials are determined as a function of the beam-plasma parameters. The results of this investigation can be used to predict the plasma properties at the surface of a substrate in process plasma discharges containing thermal electron beams.Keywords
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