The possibility of sputtering by point defects
- 1 December 1978
- journal article
- other
- Published by Taylor & Francis in Philosophical Magazine A
- Vol. 38 (6) , 727-731
- https://doi.org/10.1080/01418617808239267
Abstract
Fine structure has been observed in the time-of-flight spectra of atoms sputtered from the {100} surface of a gold crystal by 20 keV Ar+ ions. Sharp peaks are observed at 7 and 13 eV which account for > 10−2 atom/ion and which we cannot explain by existing collision models of sputtering. It is proposed that interstitial defects migrate to the surface, releasing part of their formation energy to eject atoms with well-defined energies.Keywords
This publication has 19 references indexed in Scilit:
- Measurement of the velocity distribution of metal atoms sputtered by light and heavy particlesJournal of Nuclear Materials, 1978
- Energy and angular distribution of gold and copper atoms sputtered with either 15-or 30-KeV H+, He+, and Ar+ ionsJournal of Nuclear Materials, 1978
- Lattice theory of point defectsJournal of Nuclear Materials, 1978
- Theory of thermal sputteringRadiation Effects, 1977
- The effect of surface recoils on the energy distribution of sputtered goldNuclear Instruments and Methods, 1976
- Nonlinear effects in heavy-ion sputteringJournal of Applied Physics, 1974
- Precision measurements on the angular and temperature dependence of sputteringRadiation Effects, 1972
- The energy distribution of sputtered atoms from goldRadiation Effects, 1972
- Energieverteilungen bei der Festkörperzerstäubung durch IonenbeschußThe European Physical Journal A, 1970
- On the Mechanism of SputteringPhysica Status Solidi (b), 1966