Carrier Lifetime Measurements by Microwave Photoconductive Decay Method at Low Injection Levels
- 1 September 1993
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 32 (9B) , L1362
- https://doi.org/10.1143/jjap.32.l1362
Abstract
The minority carrier lifetime of Si wafers has been measured at very low injection levels by employing a newly developed microwave photoconductive decay (µ-PCD) technique. It is found that the effective lifetime is dramatically increased for the case of p-type Si when the injection level is reduced to two orders of magnitude less than the equilibrium value. In contrast to this, the n-type wafer lifetime remains almost un-changed even upon lowering the injection level. Also, it is shown that the different contamination levels of Fe in Si wafers are clearly discriminated by the measured lifetime.Keywords
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