Optical and transport properties of amorphous and microcrystalline silicon films prepared by excimer laser assisted rf glow-discharge deposition
- 1 March 1998
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 16 (2) , 436-443
- https://doi.org/10.1116/1.581041
Abstract
No abstract availableThis publication has 20 references indexed in Scilit:
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