Study by real time ellipsometry of the growth of amorphous and microcrystalline silicon thin films combining glow discharge decomposition and UV light irradiation
- 1 October 1993
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 233 (1-2) , 281-285
- https://doi.org/10.1016/0040-6090(93)90108-2
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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