Spectroscopic ellipsometry of ultrathin films: From UV to IR
- 1 September 1988
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 163, 157-166
- https://doi.org/10.1016/0040-6090(88)90420-8
Abstract
No abstract availableThis publication has 22 references indexed in Scilit:
- IR ellipsometry study of oriented molecular monolayersThin Solid Films, 1988
- I n s i t u investigation of the growth of rf glow-discharge deposited amorphous germanium and silicon filmsJournal of Applied Physics, 1987
- The nucleation and growth of glow-discharge hydrogenated amorphous siliconJournal of Applied Physics, 1986
- A spectroscopic ellipsometry study of the nucleation and growth of plasma-deposited amorphous siliconThin Solid Films, 1985
- OPTICAL CHARACTERIZATION BY ELLIPSOMETRY – A PROSPECTIVELe Journal de Physique Colloques, 1983
- Fast polarization modulated ellipsometer using a microprocessor system for digital Fourier analysisReview of Scientific Instruments, 1982
- Optical properties of thin filmsThin Solid Films, 1982
- The interaction of oxygen with aluminium: Mainly ellipsometric aspectsSurface Science, 1981
- Precision Bounds to Ellipsometer SystemsApplied Optics, 1975
- IR ellipsometric spectroscopy: Its application to butanol adsorbed on silverSurface Science, 1974