Analysis of TiN by charged particle beams: Nuclear reaction analysis, nuclear reaction broadening and Rutherford backscattering

This publication has 24 references indexed in Scilit:

• Crystaline effects in single crystal and highly textured TiN_xfilms
  Surface and Interface Analysis, 1988
• The effect of nitrogen content on the critical normal force in scratch testing of TiN films
  Thin Solid Films, 1987
• The Ti-N system: Equilibrium between the δ, ϵ and α phases and the conditions of formation of the lobier and marcon metastable phase
  Journal of the Less Common Metals, 1987
• Peak resolving of complex Auger spectra by least-squares fitting with prefiltering of spectra: An application to depth profiling
  Journal of Vacuum Science & Technology A, 1986
• Quantitative auger electron analysis of titanium nitrides
  Surface Science, 1985
• Reactive high rate D.C. sputtering: Deposition rate, stoichiometry and features of TiOx and TiNx films with respect to the target mode
  Thin Solid Films, 1984
• Applications of TiN thin films in silicon device technology
  Thin Solid Films, 1982
• A method for determining depth profiles of transition elements in steels
  Nuclear Instruments and Methods, 1980
• Principles and applications of ion beam techniques for the analysis of solids and thin films
  Thin Solid Films, 1973
• Microanalysis by the direct observation of nuclear reactions using a 2 MeV Van de Graaff
  Nuclear Instruments and Methods, 1971