Tantalum(v) diethylamide, [Ta(NEt2)5]: a potentially important and crystalline precursor for the CVD of oxides containing tantalum
- 1 January 2006
- journal article
- Published by Royal Society of Chemistry (RSC) in Journal of Materials Chemistry
- Vol. 16 (23) , 2226-2228
- https://doi.org/10.1039/b602986h
Abstract
The homoleptic amide [Ta(NEt2)5] is regularly described in the CVD literature as being an unstable liquid. The compound in its pure form is a solid. The structure has been confirmed by single crystal X-ray diffraction and is shown to have a distorted trigonal bipyramidal structure with a Ta-N5 core.Keywords
This publication has 12 references indexed in Scilit:
- A new precursor for the chemical vapor deposition of tantalum nitride filmsJournal of Materials Chemistry, 2004
- Growth of Hafnium Dioxide Thin Films by Liquid‐Injection MOCVD Using Alkylamide and Hydroxylamide PrecursorsChemical Vapor Deposition, 2003
- Highly Conformal Thin Films of Tungsten Nitride Prepared by Atomic Layer Deposition from a Novel PrecursorChemistry of Materials, 2003
- Highlights in the Renaissance of Amidometal ChemistryAngewandte Chemie International Edition in English, 2000
- Transition metal dicarbollide complexes: synthesis, molecular, crystal and electronic structures of [M(C2B9H11)(NMe2)3] (M = Nb or Ta) and their insertion reactions with CO2 and CS2 †J. Chem. Soc., Dalton Trans., 1999
- Crystal and molecular structures of tert-butyltetrakis(dimethylamido)tantalum(V), bromo(p-tolyl)tris(dimethylamido)tantalum(V), and [(trimethylsilyl)methyl]tetrakis(N,N-dimethylcarbamato)tantalum(V). Evidence for stabilization of .sigma.-alkyl ligands by strongly .pi.-donating ligands in early transition metal chemistryJournal of the American Chemical Society, 1982
- TANTALUM–CARBON BOND FORMATION IN THE THERMAL DECOMPOSITION OF TANTALUM DIETHYLAMIDEChemistry Letters, 1978
- Transition-metal dialkylamides and disilylamidesAccounts of Chemical Research, 1976
- X-Ray crystal and molecular structures of pentakisdimethylaminato- and pentapiperidinato-niobium(V)Journal of the Chemical Society D: Chemical Communications, 1971
- METALLO-ORGANIC COMPOUNDS CONTAINING METAL–NITROGEN BONDS: PART III. DIALKYLAMINO COMPOUNDS OF TANTALUMCanadian Journal of Chemistry, 1962