Small angle X-ray scattering from microvoids in the a-SiC:H alloy
- 1 January 1989
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 36 (12) , 2859-2862
- https://doi.org/10.1109/16.40947
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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