Neutron depth profiling at the National Bureau of Standards
- 1 December 1983
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 218 (1-3) , 47-51
- https://doi.org/10.1016/0167-5087(83)90953-5
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Characterization of Near Surface Composition of Borosilicate Glasses (BSG) by Secondary Ion Mass Spectrometry (SIMS)Journal of the Electrochemical Society, 1982
- The use of the neutron induced reaction for boron profiling in SiNuclear Instruments and Methods in Physics Research, 1981
- Range parameters of boron implanted into siliconApplied Physics B Laser and Optics, 1981
- Single crystal filters for neutron spectrometryReview of Scientific Instruments, 1980
- The use of neutron induced reactions for light element profiling and lattice localizationNuclear Instruments and Methods, 1978
- The determination of low dose boron implanted concentration profiles in silicon by the (n,α) reactionNuclear Instruments and Methods, 1975
- Technique for determining concentration profiles of boron impurities in substratesJournal of Applied Physics, 1972
- Smoothing and Differentiation of Data by Simplified Least Squares Procedures.Analytical Chemistry, 1964