Thin Film Transistors Made from Hydrogenated Microcrystalline Silicon
- 1 January 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (1S)
- https://doi.org/10.1143/jjap.33.639
Abstract
Microcrystalline silicon films were deposited by diluted-hydrogen method and hydrogen-atom-treatment method at 250° C in a plasma enhanced chemical vapor deposition system and they were characterized by nuclear magnetic resonance, Raman spectroscopy, and optical bandgap measurements. One-mask a-Si:H thin film transistors (TFT's) were fabricated with those microcrystalline materials as the channel layer. The highest electron mobilities of the TFT's fabricated by diluted-hydrogen method and hydrogen-atom-treatment method were 1.23 and 1.04 cm2/V·s, respectively without any thermal treatment steps.Keywords
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