Applications of gas cluster ion beams for materials processing
- 30 October 1996
- journal article
- Published by Elsevier in Materials Science and Engineering: A
- Vol. 217-218, 82-88
- https://doi.org/10.1016/s0921-5093(96)10358-0
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Surface modifications by gas cluster ion beamsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1995
- Influence of ionization processes on radiation defect formationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993
- Irradiation effects of gas-cluster CO2 ion beams on SiNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993
- Light ion sputtering for H, D and He in the energy range of 25 keV to 100 keVJournal of Nuclear Materials, 1982