The deposition of AgC:H films: a tool to understand the role of carbide-forming metals in the MeC:H deposition process
- 7 July 1991
- journal article
- Published by Elsevier in Materials Science and Engineering: A
- Vol. 140, 764-769
- https://doi.org/10.1016/0921-5093(91)90510-t
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Target effects during the deposition of Ti-a-C:H filmsSurface and Coatings Technology, 1989
- Identification of carbon and tantalum chemical states in metal-doped a-C:H filmsSurface and Coatings Technology, 1988
- Tribological and electrical properties of metal-containing hydrogenated carbon filmsApplied Physics Letters, 1987