Optical and compositional studies of SiN thin films with conventional and synchrotron radiation ellipsometry
- 15 June 1993
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 73 (12) , 8514-8518
- https://doi.org/10.1063/1.353379
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
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