Measurement of Si(111) surface stress by a microscopic technique
- 15 December 1994
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 50 (23) , 17628-17631
- https://doi.org/10.1103/physrevb.50.17628
Abstract
We have developed a method for the local measurement of surface stress using transmission electron microscopy. Applying this technique to the clean Si(111) surface during 7×7-1×1 phase coexistence, we determine the stress difference between the phases to be 30±5 meV/A. This relatively small difference is consistent with the presence of adatoms in the 1×1 surface. The method can be easily extended to other surfaces and interfaces that have well-defined domain boundaries.
Keywords
This publication has 20 references indexed in Scilit:
- Elastic-displacement field of an isolated surface stepPhysical Review B, 1994
- Surface steps and surface morphology: understanding macroscopic phenomena from atomic observationsSurface Science, 1994
- Strain effects on Si(001)Surface Science, 1994
- Imaging subsurface strain at atomic steps on Si(111)Journal of Vacuum Science & Technology A, 1993
- Surface stresses in atomic reconstructions of lead on silicon (111)Surface Science, 1992
- Surface step configurations under strain: kinetics and step-step interactionsSurface Science, 1991
- Direct measurement of crystal surface stressPhysical Review Letters, 1990
- Mechanical stresses in (sub)monolayer epitaxial filmsPhysical Review Letters, 1990
- Origins of stress on elemental and chemisorbed semiconductor surfacesPhysical Review Letters, 1989
- Absence of large compressive stress on Si(111)Physical Review Letters, 1987