Electrical properties of laser chemically doped silicon
- 15 November 1981
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 39 (10) , 825-827
- https://doi.org/10.1063/1.92572
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- UV photolysis of van der waals molecular filmsChemical Physics Letters, 1981
- Efficient Si solar cells by laser photochemical dopingApplied Physics Letters, 1981
- Ohmic contact formation on InP by pulsed laser photochemical dopingApplied Physics Letters, 1980
- Theoretical analysis of thermal and mass transport in ion-implanted laser-annealed siliconApplied Physics Letters, 1978
- Arsenic diffusion in silicon melted by high-power nanosecond laser pulsingApplied Physics Letters, 1978