Effect of Oxygen Plasma Treatment on Hydrogen-Damaged Pt/Pb(ZrxTi1-x)O3/Pt Ferroelectric Thin-Film Capacitor
- 1 May 1999
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 38 (5B) , L577-579
- https://doi.org/10.1143/jjap.38.l577
Abstract
Electron cyclotron resonance (ECR) oxygen plasma treatment of the Pt/Pb(Zr x Ti1-x )O3/Pt capacitor was attempted to reduce the property degradation due to hydrogen. It was found that oxygen plasma treatment using ECR modifies the surface of Pt electrodes. Surface modification deteriorates catalytic activity of Pt electrodes, thereby significantly improving ferroelectric properties such as remnant polarization and leakage current. It seems that highly reactive oxygen radicals in ECR plasma play an important role in deteriorating the catalytic activity of Pt electrodes.Keywords
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