Low-cost Technology For Multilayer Electroplated Parts Using Laminated Dry Film Resist
- 25 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
An innovative technology for the realization of key elements of a microfabricated reduction unit is presented. In view of integrating the functions of gear, pinion and axle into one element, multilevel metal electroplating in a negative dry film resist mould (Riston) is used. Easier processing, inherent planarization for multilevel 3-D structures, vertical sidewalls and high thicknesses (20 - 50 /spl mu/m/level) are shown to be the main key features of dry films. To demonstrate the process feasibility a gear and pinion set with upper and lower axle posts has been realized with four levels of nickel.Keywords
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