Extension of krypton fluoride excimer laser lithography to the fabrication of 0.18 μm devices
- 1 September 1997
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 15 (5) , 1825-1832
- https://doi.org/10.1116/1.589532
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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