Thermal degradation of TiSi2/poly-Si gate electrodes
- 1 January 1989
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 168 (2) , 325-334
- https://doi.org/10.1016/0040-6090(89)90016-3
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
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