Electrical activation in silicon-on-insulator after low energy boron implantation
- 2 August 2004
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 96 (4) , 1891-1898
- https://doi.org/10.1063/1.1769095
Abstract
No abstract availableThis publication has 40 references indexed in Scilit:
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