High-quality focused-ion-beam-made mirrors for InGaP/InGaAlP visible-laser diodes

This publication has 8 references indexed in Scilit:

• Focused-ion-beam-induced tungsten deposition: theory and experiment
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993
• 1.5 μm InGaAsP/InP vertically coupled semiconductor optical pre-amplifier
  Applied Physics Letters, 1991
• 4×4 Surface-Emitting 1.55 µm InGaAsP/InP Laser Arrays with Microcoated Reflectors Fabricated by Reactive Ion Etching
  Japanese Journal of Applied Physics, 1991
• Focused ion beam machining of mirror facets of a monolithically integrated GaAs/GaAlAs double heterojunction (DH) laser and its optical waveguide.
  Microelectronic Engineering, 1990
• Spectral locking in an extended area two-dimensional coherent grating surface emitting laser array
  IEEE Photonics Technology Letters, 1990
• InGaAsP/InP Lasers with Two Reactive-Ion-Etched Mirror Facets
  Japanese Journal of Applied Physics, 1989
• Micromachining of integrated optical structures
  Applied Physics Letters, 1986
• Beam-propagation method: analysis and assessment
  Journal of the Optical Society of America, 1981