Focused-ion-beam-induced tungsten deposition: theory and experiment
- 1 January 1993
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 80-81, 1324-1327
- https://doi.org/10.1016/0168-583x(93)90792-5
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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- Model for focused ion beam depositionPublished by SPIE-Intl Soc Optical Eng ,1990
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