Fine Line Patterning By Focused Ion Beam Induced Decomposition of Palladium Acetate Films
- 1 January 1986
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Integrated circuit repair using focused ion beam millingJournal of Vacuum Science & Technology B, 1986
- Laser-initiated deposition reactions: Microchemistry in organogold polymer filmsApplied Physics Letters, 1985
- Inorganic ion beam resist for additive plating of metallic interconnectsApplied Physics Letters, 1985
- The formation of conductive films on polyimide by ion-beam-induced decomposition of metal compoundsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985