Depth profiling of oxygen in oxidized ceramic Si3N4 with the backscattering technique
- 1 September 1977
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 145 (2) , 347-351
- https://doi.org/10.1016/0029-554x(77)90431-1
Abstract
No abstract availableKeywords
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