Theoretical and experimental study of silicon micromachined microheater with dielectric stacked membranes
- 1 December 1997
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 63 (3) , 183-189
- https://doi.org/10.1016/s0924-4247(97)80503-1
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Applications of thermal silicon sensors on membranesSensors and Actuators A: Physical, 1995
- A substrate for thin-film gas sensors in microelectronic technologySensors and Actuators B: Chemical, 1990
- Thermal conductivity of dielectric thin filmsJournal of Applied Physics, 1989
- Floating-membrane thermal vacuum sensorSensors and Actuators, 1988
- An integrated low-power thin-film CO gas sensor on siliconSensors and Actuators, 1988
- Microfabricated structures for the i n s i t u measurement of residual stress, Young’s modulus, and ultimate strain of thin filmsApplied Physics Letters, 1987
- Thermal stresses and cracking resistance of dielectric films (SiN, Si3N4, and SiO2) on Si substratesJournal of Applied Physics, 1978
- Surface charge and stress in the Si/SiO2 systemSolid-State Electronics, 1973