Monolithic integration of vertical-cavity surface-emitting laser and diffractive optical element for advanced beam shaping
- 1 May 1999
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 11 (5) , 503-505
- https://doi.org/10.1109/68.759379
Abstract
We have demonstrated a vertical-cavity surface-emitting laser (VCSEL) with a monolithically integrated diffractive optical element (DOE) for advanced beam shaping. The DOE is a two-level surface relief, etched into the GaAs substrate beneath a bottom-emitting VCSEL. The combination generates a 4/spl times/4 array of focused spots 10 mm from the substrate with spot sizes down to less than 400 /spl mu/m, almost at the diffraction limit. Diffraction efficiencies of 29% and uniformity errors of 14% were measured.Keywords
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