Micromilling development and applications for microfabrication
- 28 February 1997
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 35 (1-4) , 367-372
- https://doi.org/10.1016/s0167-9317(96)00198-0
Abstract
No abstract availableKeywords
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- Development of the micromilling process for high-aspect-ratio microstructuresJournal of Microelectromechanical Systems, 1996
- Published by American Vacuum Society ,1994
- High-resolution focused ion beamsReview of Scientific Instruments, 1993
- Energy Dissipation in the Ultraprecision Machining of CopperCIRP Annals, 1991