Porous silicon microstructure as studied by transmission electron microscopy
- 9 October 1989
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 55 (15) , 1540-1542
- https://doi.org/10.1063/1.102239
Abstract
Cross-sectional and plan-view transmission electron micrograph analysis of the structure of porous silicon reveals that the pore walls are also porous, yielding a large distribution of pore sizes for a given porous silicon sample. This infrastructure appears to be a universal morphological feature of porous silicon, independent of formation conditions and doping. It is proposed that the observed microstructure explains the recently reported results of adsorption isotherm experiments.Keywords
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