Production of large O-containing neutral hydrocarbon species by a-microwave discharge
- 1 January 1994
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review E
- Vol. 49 (1) , 657-662
- https://doi.org/10.1103/physreve.49.657
Abstract
The product of O-containing species in - plasmas has been studied as a function of the oxygen partial pressure in a microwave flow tube with 2.465 GHz, 6 W, and 2.2 torr total pressure. Mass spectrometry, coupled with -ion attachment techniques, was used for the identification of the products. Studies have clearly shown the presence of various O-containing stable polymer molecules, O, O, and (n goes up to 9). The relative concentration profiles of these products have been determined as a function of composition in the feed gas. An assumption was presented that alcohols, aldehydes, and possibly O-containing radical species form in the - plasma. A reaction scheme is speculated which may account for these observed profiles.
Keywords
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