Substantiation of subplantation model for diamondlike film growth by atomic force microscopy
- 25 April 1994
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 72 (17) , 2753-2756
- https://doi.org/10.1103/physrevlett.72.2753
Abstract
Atomic force microscopy studies of films deposited from ions are reported. For energies E≥30 eV the films are diamondlike and retain the initial smoothness of the silicon substrate. For E<30 eV graphitic films evolve with the surface roughness increasing with decreasing energy. It was further found that for 120 eV deposition, at substrate temperatures 150 °C graphitic, rough films are produced. The results substantiate the subplantation model, manifesting the role of subsurface internal growth in diamondlike film formation.
Keywords
This publication has 18 references indexed in Scilit:
- Direct ion beam deposition of carbon films on silicon in the ion energy range of 15–500 eVJournal of Applied Physics, 1991
- Compressive-stress-induced formation of thin-film tetrahedral amorphous carbonPhysical Review Letters, 1991
- Ion beam deposition in materials researchNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
- Ion beam bombardment effects during films depositionVacuum, 1988
- Negative ion source (NIABNIS) and preparation of transparent carbon films by negative carbon ion beam depositionNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Ion-based methods for optical thin film depositionJournal of Materials Science, 1986
- Preparation and structure of carbon film deposited by a mass-separated C+ ion beamJournal of Applied Physics, 1984
- The epitaxial synthesis of diamond by the deposition of low energy carbon ionsVacuum, 1984
- Diamond synthesis: internal growth during C + ion implantationProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1983
- Ion-Beam Deposition of Thin Films of Diamondlike CarbonJournal of Applied Physics, 1971