Theoretical study of the Cl desorption reaction induced by H2 in the chloride atomic layer epitaxy
- 1 January 1994
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 135 (1-2) , 259-268
- https://doi.org/10.1016/0022-0248(94)90749-8
Abstract
No abstract availableKeywords
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