New Method for Soft-Error Mapping in Dynamic Random Access Memory Using Nuclear Microprobe
- 1 December 1992
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 31 (12S)
- https://doi.org/10.1143/jjap.31.4541
Abstract
Locally sensitive positions against soft error in a dynamic random access memory (DRAM) have, for the first time, been investigated using a proton microprobe. Both soft-error (bit-state) mapping and secondary electron mapping images of the investigated area could locally identify sensitive positions against soft error. Two kinds of error modes in a DRAM (i.e., cell mode and bit-line mode) could be directly monitored.Keywords
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