Survey of compact storage rings for X-ray lithography
- 1 February 1988
- journal article
- other
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
- Vol. 264 (2-3) , 531-533
- https://doi.org/10.1016/0168-9002(88)90954-0
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- The microtron in X-ray lithographyNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Compact superconducting SR ring for X-ray lithographyNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- X-Ray Lithography: Can It Be JustifiedPublished by SPIE-Intl Soc Optical Eng ,1985
- The table-top synchrotron radiation source “Klein Erna”Nuclear Instruments and Methods in Physics Research, 1982