Modelling of images of square-wave gratings and isolated edges using rigorous diffraction theory
- 15 February 1994
- journal article
- Published by Elsevier in Optics Communications
- Vol. 105 (5-6) , 367-378
- https://doi.org/10.1016/0030-4018(94)90411-1
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Confocal imaging of a stratified mediumApplied Optics, 1994
- Convergence of the coupled-wave method for metallic lamellar diffraction gratingsJournal of the Optical Society of America A, 1993
- Coherent imaging of periodic thick fine isolated structuresJournal of the Optical Society of America A, 1993
- Modeling optical microscope images of integrated-circuit structuresJournal of the Optical Society of America A, 1991
- Optical microscope imaging of lines patterned in thick layers with variable edge geometry: theoryJournal of the Optical Society of America A, 1988
- Confocal Microscopes with Slit AperturesJournal of Modern Optics, 1988
- Distance measurements by differential confocal optical rangingApplied Optics, 1987
- Theory of optical edge detection and imaging of thick layersJournal of the Optical Society of America, 1982
- Rigorous diffraction theory for transmission phase gratings with deep rectangular groovesJournal of the Optical Society of America, 1978
- Three-dimensional structure determination of semi-transparent objects from holographic dataOptics Communications, 1969