Profile distortion in SIMS

This publication has 9 references indexed in Scilit:

• A comparison of SIMS with other techniques based on ion-beam solid interactions
  Vacuum, 1984
• SIMS study of the SiO₂/Si interface and of the Si+O₂ system
  Surface and Interface Analysis, 1983
• Implications in the use of reactive ion bombardment for secondary ion yield enhancement
  Applications of Surface Science, 1981
• Ion-beam-induced atomic mixing at the SiO2/Si interface
  Nuclear Instruments and Methods, 1981
• The influence of bombardment conditions upon the sputtering and secondary ion yields of silicon
  Applications of Surface Science, 1981
• Recoil mixing in solids by energetic ion beams
  Nuclear Instruments and Methods, 1980
• Implications in the use of sputtering for layer removal: the system Au on Si
  Radiation Effects, 1979
• SIMS Analysis of Aqueous Corrosion Profiles in Soda‐Lime‐Silica Glass
  Journal of the American Ceramic Society, 1979
• Ion-induced migration of Cu into Si
  Journal of Applied Physics, 1975