Fabrication and application of polymer coated cantilevers as gas sensors
- 1 May 1999
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 46 (1-4) , 439-442
- https://doi.org/10.1016/s0167-9317(99)00128-8
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Adsorption-induced surface stress and its effects on resonance frequency of microcantileversJournal of Applied Physics, 1995
- Micromechanical radiation dosimeterApplied Physics Letters, 1995