UV Laser Irradiation Effects on Frequency of Surface Acoustic Wave (SAW) Filters Coated with Titanium Oxide Films
- 1 July 1997
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 36 (7A) , L889
- https://doi.org/10.1143/jjap.36.l889
Abstract
Effects of ultraviolet (UV) light irradiation on the frequency of surface acoustic wave (SAW) filters coated with amorphous Ti–O thin films have been investigated by use of a pulsed KrF excimer laser. The frequency was abruptly changed by the irradiation. From the experimental results, it is concluded that the elastic properties of the Ti–O films are improved by the UV laser irradiation, and the frequency shift is dependent on a change in the velocity of SAWs propagating in the Ti–O film.Keywords
This publication has 9 references indexed in Scilit:
- High temperature stable GHz-range low-loss wide band transducers and filter using SiO/sub 2//LiNbO/sub 3/, LiTaO/sub 3/IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1995
- X-ray photoelectron spectroscopy of uv laser irradiated sapphire and aluminaJournal of Materials Research, 1994
- Electroless copper films deposited onto laser-activated aluminum nitride and aluminaJournal of Materials Research, 1994
- Epitaxial growth of Bi4Ti3O12 thin films by dual ion-beam sputteringApplied Surface Science, 1992
- Effect of surface acoustic wave generated on ferroelectric support upon catalysisJournal of the American Chemical Society, 1989
- Acceleration and Vibration Sensitivity of SAW DevicesIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1987
- Frequency trimming for high-frequency SAW device using ultraviolet lightElectronics Letters, 1984
- Surface acoustic wave probes for chemical analysis. II. Gas chromatography detectorAnalytical Chemistry, 1979
- Theory of interdigital couplers on nonpiezoelectric substratesJournal of Applied Physics, 1973