Single-crystal silicon torsional resonators
- 30 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
Micromechanical torsional resonators with micron-sized torsion rods fabricated from single-crystal silicon are described. The resonators and their excitation electrodes are fabricated with two simple processes called SCREAM (single-crystal-silicon reactive etch and metal). The properties of each electrode-actuator scheme are evaluated using electrostatic simulations. Such torsional resonators have potentially lower mechanical dissipation, and torsional resonators with integrated electrodes have potentially novel actuation applications.<>Keywords
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