UV radiation effects of argon plasma on Si−SiO2 structures
- 30 April 1987
- journal article
- Published by Elsevier in Microelectronics Journal
- Vol. 18 (2) , 21-27
- https://doi.org/10.1016/s0026-2692(87)80405-6
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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