Delay-time and aging effects on contrast and sensitivity of hydrogen silsesquioxane
- 1 November 2002
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 20 (6) , 2932-2936
- https://doi.org/10.1116/1.1524980
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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