Resistive contrast imaging applied to multilevel interconnection failure analysis
- 13 January 2003
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 176-182
- https://doi.org/10.1109/vmic.1989.78020
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Observation of latch-up phenomena in CMOS ICs by means of digital differential voltage contrastIEEE Journal of Solid-State Circuits, 1986
- Resistive contrast imaging: A new SEM mode for failure analysisIEEE Transactions on Electron Devices, 1986
- Fundamentals of electron beam testing of integrated circuitsScanning, 1983
- Two dimensional plotting of semiconductor resistivity by scanning electron microscopeSolid-State Electronics, 1977
- Detection of Resistivity Striations in a Ge Crystal with an Electron BeamJapanese Journal of Applied Physics, 1966