Rapid Scanning Microscope for Light Probing and Infrared Mapping

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Abstract
A rapid scanning microscope has been designed and used to light-probe the response of semiconductor devices and to observe their infrared emission and transmission. The heart of this system is a single mirror that vibrates on two perpendicular axes to deflect a light beam into a raster pattern. The single mirror scanner is relatively easy to construct, can be used with standard microscope components, and yet allows for useful wide angle deflections and a large field of view.