Observation of surface phenomena on semiconductor devices by a light spot scanning method
- 31 March 1967
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 10 (3) , 235-239
- https://doi.org/10.1016/0038-1101(67)90078-0
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Scanning electron microscopyMicroelectronics Reliability, 1965
- Charges on Oxidized Silicon SurfacesPhysical Review Letters, 1963
- Avalanche Effects in Silicon p—n Junctions. I. Localized Photomultiplication Studies on MicroplasmasJournal of Applied Physics, 1963
- Field-Induced Conductivity Changes in GermaniumPhysical Review B, 1956